Marco Pisani1<\/span><\/span>, Andrew Yacoot<\/span>2<\/span><\/span>, Petr Balling<\/span>3<\/span><\/span>, Nicola Bancone<\/span>1<\/span><\/span>,<\/span><\/span><\/p>\n Cengiz Birlikseven4<\/span><\/span>, Mehmet Celik<\/span>4<\/span><\/span>, Jens Fl \u00fcgge<\/span>5<\/span><\/span>, Ramiz Hamid<\/span>4<\/span><\/span>,<\/span><\/span><\/p>\n Paul K\u00f6chert5<\/span><\/span>, Petr Kren<\/span>3<\/span><\/span>, Ulrich Kuetgens<\/span>5<\/span><\/span>, Antti Lassila<\/span>6<\/span><\/span>,<\/span><\/span><\/p>\n Gian Bartolo Picotto1<\/span><\/span>, Ersoy Sahin<\/span>4<\/span><\/span>, Jeremias Sepp\u00e4<\/span>6<\/span><\/span>, Matthew Tedaldi<\/span>2<\/span><\/span><\/span><\/p>\n and ChristophWeichert5<\/span><\/span><\/span><\/p>\n 1 Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, Italy<\/span><\/p>\n 2 National Physical Laboratory (NPL), Hampton Road, Teddington, Middlesex, TW11 0LW, UK<\/span><\/p>\n 3 Czech Metrology Institute (CMI), Prague, Czech Republic<\/span><\/p>\n 4 T\u00dcBI<\/span><\/span>TAK, Ulusal Metroloji Enstit\u00fcs\u00fc (UME), PO 54, 41470 Gebze\u2013Kocaeli, Turkey<\/span><\/p>\n 5 Physikalisch-Technische Bundesanstalt (PTB), D-38116 Braunschweig, Germany<\/span><\/p>\n 6 Centre for Metrology and Accreditation (MIKES), PO box 9, Fi-02151 Espoo, Finland<\/span><\/p>\n Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.<\/p>\n The article was published in 2012 Metrologica 49 455 and can be retrieved from<\/p>\n http:\/\/iopscience.iop.org\/0026-1394\/49\/4\/455<\/a><\/p>\n","protected":false},"excerpt":{"rendered":" Comparison of the performance of the next generation of optical interferometers Marco Pisani1, Andrew Yacoot2, Petr Balling3, Nicola Bancone1, Cengiz Birlikseven4, Mehmet Celik4, Jens Fl \u00fcgge5, Ramiz Hamid4, Paul K\u00f6chert5, Petr Kren3, Ulrich Kuetgens5, Antti Lassila6, Gian Bartolo Picotto1, Ersoy … Continue reading Abstract<\/h1>\n